Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13010102
Abstract: As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance. One of the key parameters of an FBAR, the effective electromechanical coupling coefficient (Keff2),… read more here.
Keywords: fbar; influence; keff2; bulk acoustic ... See more keywords