Advanced technologies of FBAR for tuning effective electromechanical coupling coefficient
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DOI: 10.1063/5.0185078
Abstract: The film bulk acoustic wave resonator (FBAR) is one of the most popular devices in the radio frequency field. Numerous researchers are simultaneously working to develop an effective electromechanical coupling coefficient (keff2) tuning technology, aiming… read more here.
Keywords: keff2; keff2 tuning; effective electromechanical; electromechanical coupling ... See more keywords
Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13010102
Abstract: As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance. One of the key parameters of an FBAR, the effective electromechanical coupling coefficient (Keff2),… read more here.
Keywords: fbar; influence; keff2; bulk acoustic ... See more keywords