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Published in 2024 at "Advanced Engineering Materials"
DOI: 10.1002/adem.202400679
Abstract: Recent advances in the growth of carbon nanowalls (CNWs) and vertical graphene nanosheets using various plasma‐enhanced chemical vapor deposition (PECVD) methods are reviewed in this article. Growth methods are classified into hot‐ and cold‐wall reactors…
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Keywords:
effects plasma;
deposition;
kinetic interactions;
ions radicals ... See more keywords