Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma
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DOI: 10.1134/s1063780x1808007x
Abstract: The recombination kinetics of chlorine atoms on the wall of a plasmachemical reactor and on silicon samples in the positive column of a glow discharge in Cl2 has been studied experimentally. The rate constants and… read more here.
Keywords: chlorine atoms; atomic recombination; kinetics atomic; recombination ... See more keywords