A study of greyscale electron beam lithography for a 3D round shape Kinoform lens for hard X-ray optics
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DOI: 10.1016/j.mee.2020.111435
Abstract: Abstract For high quality imaging of materials in nanoscale by hard X-ray optics, high resolution lenses with high focusing/imaging efficiency are needed. Refraction based conventional Kinoform lenses with 1D linear configuration in Si has been… read more here.
Keywords: beam lithography; hard ray; optics; kinoform ... See more keywords