A study of greyscale electron beam lithography for a 3D round shape Kinoform lens for hard X-ray optics
Sign Up to like & getrecommendations! Published in 2020 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2020.111435
Abstract: Abstract For high quality imaging of materials in nanoscale by hard X-ray optics, high resolution lenses with high focusing/imaging efficiency are needed. Refraction based conventional Kinoform lenses with 1D linear configuration in Si has been… read more here.
Keywords: beam lithography; hard ray; optics; kinoform ... See more keywords
Partially coherent light propagation through a kinoform lens
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Synchrotron Radiation"
DOI: 10.1107/s1600577523000875
Abstract: The mutual optical intensity model is extended to calculate the propagation of partially coherent X-rays through a kinoform lens. read more here.
Keywords: coherent light; light propagation; partially coherent; propagation kinoform ... See more keywords