Use of Si KLL Auger shifts and the Auger parameter in XPS to distinguish Ti silicides from a Ti/Si mixture in thin films
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Electron Spectroscopy and Related Phenomena"
DOI: 10.1016/j.elspec.2019.04.004
Abstract: Abstract A particular wafer processing step involves deposition of a Ti thin film (˜6 nm to ˜13 nm) on Si, under processing conditions intended to form a silicide with specific electrical properties. It is difficult, however, to… read more here.
Keywords: use kll; shifts auger; kll auger; auger parameter ... See more keywords
Ultrafast Charge Transfer Processes Accompanying KLL Auger Decay in Aqueous KCl Solution.
Sign Up to like & getrecommendations! Published in 2017 at "Physical review letters"
DOI: 10.1103/physrevlett.119.263003
Abstract: X-ray photoelectron and KLL Auger spectra were measured for the K^{+} and Cl^{-} ions in aqueous KCl solution. While the XPS spectra of these ions have similar structures, both exhibiting only weak satellites near the… read more here.
Keywords: charge; aqueous kcl; auger; transfer processes ... See more keywords