Pulsed KrF laser-assisted direct deposition of graphitic capping layer for Cu interconnect
Sign Up to like & getrecommendations! Published in 2017 at "Carbon"
DOI: 10.1016/j.carbon.2017.07.075
Abstract: Abstract A graphitic capping layer was successfully formed on top of Cu interconnects at room temperature, using a pulsed KrF laser. The change in temperature of the Cu line was maintained below 380 °C during laser… read more here.
Keywords: laser; capping layer; graphitic capping; layer ... See more keywords
A New Insight into High-Aspect-Ratio Channel Drilling in Translucent Dielectrics with a KrF Laser for Waveguide Applications
Sign Up to like & getrecommendations! Published in 2022 at "Materials"
DOI: 10.3390/ma15238347
Abstract: A new insight into capillary channel formation with a high aspect ratio in the translucent matter by nanosecond UV laser pulses is discussed based on our experiments on KrF laser multi-pulse drilling of polymethyl methacrylate… read more here.
Keywords: high aspect; krf laser; laser; new insight ... See more keywords
Monochromatic Conical IR Emission from Decaying KrF Laser Filaments in Xenon as Coherent Stimulated Four-Wave Mixing Process
Sign Up to like & getrecommendations! Published in 2021 at "Photonics"
DOI: 10.3390/photonics8020047
Abstract: We develop theoretical background for the new nonlinear optical phenomenon of narrowly directed monochromatic IR conical emission which has been recently observed when 248-nm UV filaments propagate in xenon (V. D. Zvorykin, et al., Laser… read more here.
Keywords: coherent; process; conical emission; monochromatic conical ... See more keywords