High-performance etching of multilevel phase-type Fresnel zone plates with large apertures
Sign Up to like & getrecommendations! Published in 2018 at "Optics Communications"
DOI: 10.1016/j.optcom.2017.09.006
Abstract: Abstract To ensure the etching depth uniformity of large-aperture Fresnel zone plates (FZPs) with controllable depths, a combination of a point source ion beam with a dwell-time algorithm has been proposed. According to the obtained… read more here.
Keywords: large apertures; fresnel zone; zone plates; etching depth ... See more keywords
Subaperture stitching testing for fine flat mirrors with large apertures using an orthonormal polynomial fitting algorithm
Sign Up to like & getrecommendations! Published in 2019 at "Optics and Lasers in Engineering"
DOI: 10.1016/j.optlaseng.2019.02.017
Abstract: Abstract Interferometry, which measures the difference between a reference surface and a test surface, is widely used in high-precision testing. Usually the reference surface is considered as perfect and the surface errors there can be… read more here.
Keywords: surface; reference surface; polynomial fitting; orthonormal polynomial ... See more keywords