Molecular dynamics simulations with electronic stopping can reproduce experimental sputtering yields of metals impacted by large cluster ions
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DOI: 10.1016/j.apsusc.2017.11.080
Abstract: Abstract An unsolved problem in research of sputtering from metals induced by energetic large cluster ions is that molecular dynamics (MD) simulations often produce sputtering yields much higher than experimental results. Different from the previous… read more here.
Keywords: sputtering yields; molecular dynamics; large cluster; sputtering ... See more keywords