Articles with "large curved" as a keyword



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Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask

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Published in 2023 at "Micromachines"

DOI: 10.3390/mi14030526

Abstract: The Mo/Si multilayer mirror has been widely used in EUV astronomy, lithography, microscopy and other fields because of its high reflectivity at the wavelength around 13.5 nm. During the fabrication of Mo/Si multilayers on large,… read more here.

Keywords: microstructure multilayers; mask; multilayers deposited; shadow mask ... See more keywords