Theoretical study of the laser annealing process in FinFET structures
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2018.10.155
Abstract: Abstract In this paper we present a computational tool for the simulation of laser annealing processes in FinFET structures. This is a complex self-consistent problem, where heating is evaluated by means of the time harmonic… read more here.
Keywords: theoretical study; process; study laser; finfet structures ... See more keywords
Diode laser annealing of epitaxy Ge on sapphire (0 0 0 1) grown by magnetron sputtering
Sign Up to like & getrecommendations! Published in 2017 at "Materials Letters"
DOI: 10.1016/j.matlet.2017.05.043
Abstract: Abstract In this work, magnetron sputtering was used to epitaxially grow Ge films on sapphire at low temperatures (400 °C–500 °C) and diode laser annealing was employed to improve the crystallinity of the Ge films. The deposition… read more here.
Keywords: annealing epitaxy; magnetron sputtering; laser; sapphire ... See more keywords
High performance Ge ultra-shallow junctions fabricated by a novel formation technique featuring spin-on dopant and laser annealing for sub-10 nm technology applications
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2016.10.002
Abstract: Abstract In this work, we explored a novel technique for the formation of ultra-shallow p+/n and n+/p junctions on Ge substrate using the spin-on dopant (SOD) followed by laser annealing (LA). The junction depth and… read more here.
Keywords: technique; ultra shallow; formation; shallow junctions ... See more keywords
Large single-crystal Ge-on-insulator by thermally-assisted (~400 °C) Si-seeded-pulse-laser annealing
Sign Up to like & getrecommendations! Published in 2017 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2016.10.033
Abstract: Abstract Low temperature (≤400 °C) formation of orientation-controlled large (≥10 µm) Ge-on-insulator (GOI) structures is desired to fabricate 3-dimensional large-scale integrated circuits (LSIs), where Ge-based functional devices are stacked on Si-LSIs. For this purpose, Si-seeded pulse-laser annealing… read more here.
Keywords: temperature; thermally assisted; laser annealing; seeded pulse ... See more keywords
Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC
Sign Up to like & getrecommendations! Published in 2019 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2019.02.031
Abstract: Abstract This work reports on the morphological and electrical properties of Ni-based back-side Ohmic contacts formed by laser annealing process for SiC power diodes. Nickel films, 100 nm thick, have been sputtered on the back-side of… read more here.
Keywords: morphological electrical; ohmic contacts; process; laser annealing ... See more keywords
Investigation of minority carrier traps in p-type mc-Si: Effect of firing and laser annealing
Sign Up to like & getrecommendations! Published in 2021 at "Solar Energy Materials and Solar Cells"
DOI: 10.1016/j.solmat.2021.111341
Abstract: Abstract Recently, it has been shown that the investigation of minority carrier traps (traps) is a useful method to study defects in silicon wafers. In this paper, we report the presence of traps in p-type… read more here.
Keywords: traps type; carrier traps; investigation minority; laser annealing ... See more keywords
Sequential lateral crystallization of amorphous silicon on glass by blue laser annealing for high mobility thin-film transistors
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.04.023
Abstract: Abstract We report the thickness effect of amorphous silicon for the polycrystalline silicon (poly-Si) layer laterally crystallized by blue laser annealing (BLA) using 50 μs melting time. The grain size is much larger and full width… read more here.
Keywords: blue laser; thin film; silicon; laser annealing ... See more keywords
Macroscopic Alignment of Block Copolymers on Silicon Substrates by Laser Annealing
Sign Up to like & getrecommendations! Published in 2020 at "ACS Nano"
DOI: 10.1021/acsnano.0c00696
Abstract: Laser annealing is a competitive alternative to conventional oven annealing of block copolymer (BCP) thin films enabling rapid acceleration and precise spatial control of the self-assembly process. Localized heating by a moving laser beam (zone… read more here.
Keywords: macroscopic alignment; laser; laser annealing; alignment block ... See more keywords
Atomic Layer MoTe2 Field-Effect Transistors and Monolithic Logic Circuits Configured by Scanning Laser Annealing.
Sign Up to like & getrecommendations! Published in 2021 at "ACS nano"
DOI: 10.1021/acsnano.1c07169
Abstract: Atomically thin semiconductors such as transition metal dichalcogenides have recently enabled diverse devices in the emerging two-dimensional (2D) electronics. While scalable 2D electronics demand monolithic integrated circuits consisting of complementary p-type and n-type transistors, conventional… read more here.
Keywords: laser annealing; laser; mote2; logic circuits ... See more keywords
Electronic, Structural, and Magnetic Upgrading of Coal-Based Products through Laser Annealing.
Sign Up to like & getrecommendations! Published in 2022 at "ACS nano"
DOI: 10.1021/acsnano.1c07693
Abstract: Most coal-to-product routes require complex thermal treatment to carbonize the raw materials. However, the lack of unified comparison of products made from different kinds of coals downplays the role of initial coal chemistry in high-temperature… read more here.
Keywords: laser annealing; electronic structural; chemistry; coal ... See more keywords
Laser annealing of electrodeposited CuInSe2 semiconductor precursors: experiment and modeling
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Materials Chemistry C"
DOI: 10.1039/c6tc03623f
Abstract: Laser annealing can reduce the annealing time required to form Cu(In,Ga)(S,Se)2 (CIGSe) thin films for use in thin film photovoltaics to a single second timescale, if not faster. In this work, we use microstructural characterization… read more here.
Keywords: electrodeposited cuinse2; optical absorption; laser; cuinse2 semiconductor ... See more keywords