Preparation of highly oriented β-SiC bulks by halide laser chemical vapor deposition
Sign Up to like & getrecommendations! Published in 2017 at "Journal of The European Ceramic Society"
DOI: 10.1016/j.jeurceramsoc.2016.09.017
Abstract: Abstract Highly oriented β-SiC bulks with high hardness were fabricated by halide laser chemical vapor deposition (HLCVD) using SiCl 4 , CH 4 and H 2 as precursors. The effects of total pressure ( P… read more here.
Keywords: sic bulks; highly oriented; laser chemical; deposition ... See more keywords
Influence of oxygen partial pressure on SmBa2Cu3O7-δ film deposited by laser chemical vapor deposition
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Asian Ceramic Societies"
DOI: 10.1080/21870764.2020.1860434
Abstract: ABSTRACT Laser chemical vapor deposition (LCVD) was applied to prepare SmBa2Cu3O7-δ (SmBCO) superconductive films on single-crystalline LaAlO3 (100) substrates. The effect of oxygen partial pressure (P O2) on the crystal orientation, microstructure, and superconducting property… read more here.
Keywords: laser chemical; chemical vapor; vapor deposition; deposition ... See more keywords
High‐speed heteroepitaxial growth of 3C‐SiC (111) thick films on Si (110) by laser chemical vapor deposition
Sign Up to like & getrecommendations! Published in 2018 at "Journal of the American Ceramic Society"
DOI: 10.1111/jace.15260
Abstract: 3C-SiC (111) thick films were grown on Si (110) substrate via laser chemical vapor deposition (laser CVD) using hexamethyldisilane (HMDS) as precursor and argon (Ar) as dilution gas. The 3C-SiC (111) polycrystalline films were prepared… read more here.
Keywords: laser chemical; sic 111; thick films; deposition ... See more keywords
In Situ Doping of Nitrogen in -Oriented Bulk 3C-SiC by Halide Laser Chemical Vapour Deposition
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DOI: 10.3390/ma13020410
Abstract: Doping of nitrogen is a promising approach to improve the electrical conductivity of 3C-SiC and allow its application in various fields. N-doped, -oriented 3C-SiC bulks with different doping concentrations were prepared via halide laser chemical… read more here.
Keywords: laser chemical; 110 oriented; deposition; chemical vapour ... See more keywords