Vibration Measurement and Suppression for Laser Galvanometers Using a Micro-electromechanical System-based Accelerometer
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DOI: 10.18494/sam.2018.1976
Abstract: 1Department of Mechanical and Mechatronics Systems Research Labs., Industrial Technology Research Institute (ITRI), 195, Sec. 4, Chung Hsing Road, Chutung, Hsinchu 31040, Taiwan 2Department of Automatic Control Engineering, Feng Chia University (FCU), No. 100, Wenhwa… read more here.
Keywords: using micro; vibration measurement; galvanometers using; laser galvanometers ... See more keywords