Comparison of Langmuir probe and laser Thomson scattering for electron property measurements in magnetron discharges
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DOI: 10.1063/1.5109621
Abstract: Electron property measurements made by Langmuir probes and laser Thomson scattering have been compared in weakly magnetized plasma conditions using a planar unbalanced magnetron with the aim of assessing the accuracy of the probe diagnostic.… read more here.
Keywords: thomson scattering; probe; electron property; laser thomson ... See more keywords