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Published in 2023 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c22920
Abstract: To date, thermal nanoimprint lithography (NIL) for patterning hybrid perovskites has always involved an intricate etching step of a hard stamp material or its master. Here, we demonstrate for the first time the successful nanopatterning…
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Keywords:
lasers thermal;
thermal nanoimprint;
distributed feedback;
feedback lasers ... See more keywords