Modelling anisotropic lateral oxidation from circular mesas
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DOI: 10.1364/ome.8.001762
Abstract: In this paper, an iterative method to model the anisotropic lateral oxidation of circular structures is proposed and validated by confrontation to experimental data. The described model enables the efficient calculation of the temporal bi-dimensional… read more here.
Keywords: modelling anisotropic; oxidation; lateral oxidation; oxidation circular ... See more keywords