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Published in 2019 at "Optik"
DOI: 10.1016/j.ijleo.2017.12.024
Abstract: Abstract In this paper, we employed a quadruple-layer antireflection coating structure with Al2O3 deposited by DC reactive magnetron sputtering and SiO2 deposited by PECVD (plasma enhanced chemical vapor) deposition as the bottom layer, and proposed…
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Keywords:
quadruple layer;
layer antireflection;
silicon solar;
antireflection coatings ... See more keywords