Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films
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DOI: 10.1002/advs.202503561
Abstract: Atomic layer modulation (ALM) presents a novel approach for controlling the stoichiometry of platinum‐ruthenium (PtRu) alloys rather than a tedious atomic layer deposition (ALD) supercycling multielement ALD process. This method sequentially pulses dimethyl‐(N,N‐dimethyl‐3‐butene‐1‐amine‐N)platinum (C8H19NPt, DDAP)… read more here.
Keywords: ptru; atomic layer; alloy; layer modulation ... See more keywords