Impact of Mo Barrier Layers on the Interface and Microstructure of Al/Sc Multilayers for the Extreme Ultraviolet Range.
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DOI: 10.1021/acsami.4c22676
Abstract: Al/Sc multilayers are potential optical elements to be used for the extreme ultraviolet range at wavelengths longer than the Sc M2,3 absorption edge. The existing research exhibits a significant gap concerning the incorporation of a… read more here.
Keywords: spectroscopy; microstructure multilayers; layers interface; barrier layers ... See more keywords