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Structural and Dielectric Study of Thin Amorphous Layers of the Ge–Sb–Te System Prepared by RF Magnetron Sputtering

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Published in 2020 at "Semiconductors"

DOI: 10.1134/s106378262002013x

Abstract: Abstract The results of studying the structure and processes of dielectric relaxation in thin layers of Ge–Sb–Te are presented. The found permittivity dispersion and occurrence of dielectric-loss maxima in the low-frequency region are explained by… read more here.

Keywords: structural dielectric; thin amorphous; amorphous layers; dielectric study ... See more keywords