ScAlN-Based LCAT Mode Resonators Above 2 GHz With High FOM and Reduced Fabrication Complexity
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DOI: 10.1109/led.2017.2747089
Abstract: This letter reports the first implementation of a new class of laterally coupled alternating thickness (LCAT) mode resonators operating above 2 GHz, realised by replacing the bottom interdigitated electrodes of the conventional LCAT mode resonator… read more here.
Keywords: lcat mode; mode; mode resonators; tex math ... See more keywords