Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication
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DOI: 10.1038/s41598-022-09277-8
Abstract: Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below… read more here.
Keywords: meta optics; optics; length tuning; focal length ... See more keywords