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Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618003537
Abstract: A constant theme spanning the history of the scanning electron microscope (SEM) has been improving spatial resolution. Recent developments in SEM instrumentation (e.g., the thermal field emission gun, low aberration objective lenses, low beam energy…
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Keywords:
resolution;
contrast;
establishing visibility;
level contrast ... See more keywords