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Published in 2020 at "Nanotechnology"
DOI: 10.1088/1361-6528/ab9474
Abstract: For biomolecule sensing purposes a solid-state nanopore platform based on silicon has certain advantages as compared to nanopores on other substrates such as graphene, silicon nitride, silicon oxide etc. Capitalizing on the developed CMOS technology,…
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Keywords:
solid state;
state;
wafer level;
level fabrication ... See more keywords