1000-Pixels per Inch Transistor Arrays Using Multi-Level Imprint Lithography
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DOI: 10.1109/led.2020.3006343
Abstract: Sub-micrometer thin-film transistors (TFTs) are realized using multi-level imprint lithography. Amorphous indium gallium zinc oxide ( $\alpha $ -IGZO) TFTs with channel lengths as small as $0.7~\mu \text{m}$ , field-effect mobility of 10 cm2V−1s−1 and… read more here.
Keywords: using multi; sup; level imprint; sup sup ... See more keywords