Methods to Improve Bulk Lifetime in n-Type Czochralski-Grown Upgraded Metallurgical-Grade Silicon Wafers
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DOI: 10.1109/jphotov.2018.2834944
Abstract: This paper investigates the potential of three different methods—tabula rasa (TR), phosphorus diffusion gettering (PDG), and hydrogenation, for improving the carrier lifetime in n-type Czochralski-grown upgraded metallurgical-grade (UMG) silicon samples. Our results show that the… read more here.
Keywords: lifetime type; czochralski grown; upgraded metallurgical; type ... See more keywords