Articles with "lift process" as a keyword



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Highly periodic Au nano-disc arrays for plasmon-resonant SERS structures on fused silica using UV-NIL based double-layer lift-off process

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Published in 2017 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2017.02.020

Abstract: Au nanostructures of different types are widely employed as substrates for surface-enhanced Raman spectroscopy (SERS) due to their strong plasmon-related near-field enhancement in the visible and NIR frequency range as well as their potential for… read more here.

Keywords: periodic nano; highly periodic; layer lift; double layer ... See more keywords
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High-temperature-capable ALD-based inorganic lift-off process

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Published in 2021 at "Materials Science in Semiconductor Processing"

DOI: 10.1016/j.mssp.2021.105809

Abstract: Abstract Lift-off is a useful method to pattern metals or other materials in semiconductor device fabrication. Polymer photoresists are commonly used for lift-off; however, these resists cannot be used when the device fabrication requires high… read more here.

Keywords: process; inorganic lift; high temperature; lift ... See more keywords
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Flexible Cu(In,Ga)Se2 solar cell with superstrate-type configuration fabricated by a lift-off process

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Published in 2018 at "Thin Solid Films"

DOI: 10.1016/j.tsf.2018.07.033

Abstract: Abstract Flexible Cu(In,Ga)Se2 (CIGS) solar cells with a superstrate-type configuration including highly transparent ethylene tetrafluoroethylene (ETFE) films as superstrates were fabricated by a lift-off process. The substrate-type CIGS solar cells with a structure of soda-lime… read more here.

Keywords: solar cell; superstrate type; type; cigs solar ... See more keywords