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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13040584
Abstract: Capacitive MEMS accelerometers have a high thermal sensitivity that drifts the output when subjected to changes in temperature. To improve their performance in applications with thermal variations, it is necessary to compensate for these effects.…
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Keywords:
calibration;
calibration technique;
drift;
lightweight algorithm ... See more keywords