Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step
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DOI: 10.1049/el.2017.2863
Abstract: A single-step ductile dicing process capable of manufacturing optical quality facets in lithium niobate (LiNbO3) ridge waveguides with an average surface roughness of 0.29 nm is reported. This result is comparable with surface roughnesses achieved… read more here.
Keywords: linbo3 ridge; surface roughness; surface; step ... See more keywords