Infrared spectroscopic ellipsometry of micrometer-sized SiO 2 line gratings
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DOI: 10.1016/j.apsusc.2017.04.118
Abstract: Abstract For the design and process control of periodic nano-structured surfaces spectroscopic ellipsometry is already established in the UV–VIS spectral regime. The objective of this work is to show the feasibility of spectroscopic ellipsometry in… read more here.
Keywords: ellipsometry; line gratings; micrometer sized; spectroscopic ellipsometry ... See more keywords