A study on the E-H mode transition with the line integrated He 23S metastable atom density in an inductively coupled plasma
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DOI: 10.1016/j.cap.2021.04.015
Abstract: Abstract Helium (He) inductively coupled plasma (ICP) was generated by a right-helical-type RF antenna. At a fixed He pressure of 20 mTorr, the optical emission spectrum from the He plasma was measured with RF power.… read more here.
Keywords: mode transition; transition line; density; line integrated ... See more keywords