Reconstruction design method of an aspherical recording optical system for the varied line-space grating.
Sign Up to like & getrecommendations! Published in 2022 at "Optics letters"
DOI: 10.1364/ol.469523
Abstract: A reconstruction design method for an aspherical recording system for varied line-space gratings is introduced. This method converts the recording system design from achieving specific groove distribution coefficients within the expansion model into reconstruction of… read more here.
Keywords: line space; varied line; aspherical recording; design ... See more keywords
Resist-Free Directed Self-Assembly Chemo-Epitaxy Approach for Line/Space Patterning
Sign Up to like & getrecommendations! Published in 2020 at "Nanomaterials"
DOI: 10.3390/nano10122443
Abstract: This work reports a novel, simple, and resist-free chemo-epitaxy process permitting the directed self-assembly (DSA) of lamella polystyrene-block-polymethylmethacrylate (PS-b-PMMA) block copolymers (BCPs) on a 300 mm wafer. 193i lithography is used to manufacture topographical guiding… read more here.
Keywords: line space; self assembly; line; resist free ... See more keywords