Electron beam lithography inscribed varied-line-spacing and uniform integrated reflective plane grating fabricated through line-by-line method
Sign Up to like & getrecommendations! Published in 2021 at "Optics and Lasers in Engineering"
DOI: 10.1016/j.optlaseng.2020.106456
Abstract: Abstract A varied-line-spacing (VLS) and uniform integrated reflective plane grating was inscribed by electron beam lithography (EBL) and reactive ion etching method, and its displacement sensing characteristics was tested. For the VLS grating, the groove… read more here.
Keywords: integrated reflective; reflective plane; uniform integrated; varied line ... See more keywords
A variable fixed-focus constant optimization method for a variable-included-angle varied-line-spacing plane-grating monochromator.
Sign Up to like & getrecommendations! Published in 2019 at "Journal of synchrotron radiation"
DOI: 10.1107/s1600577519004569
Abstract: Variable-included-angle varied-line-spacing plane-grating monochromators (VIA-VPGM) have been applied to many beamlines because of the self-focusing and aberration-correction function of the varied-line-spacing grating. Unfortunately, to optimize the variable-line-spacing coefficient of the grating, the fixed-focus constant (Cff)… read more here.
Keywords: included angle; line spacing; method; varied line ... See more keywords