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Published in 2019 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2892296
Abstract: This paper investigates different topologies of springs used to couple the orthogonal translational motion of proof masses in Micro-Electro-Mechanical Systems (MEMS). This type of coupling is a key issue, since the dynamic response, and hence,…
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Keywords:
elastic beams;
beams mems;
behavior elastic;
hardening softening ... See more keywords