Exploring the Limits of Cobalt Liner Thickness in Advanced Copper Interconnects
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DOI: 10.1109/led.2019.2940869
Abstract: We investigate the performance and reliability characteristics of Cu interconnects with Ta-based barrier layers and Co wetting layers at 7nm node dimensions with a focus on the impacts of reducing the Co thickness from 30Å… read more here.
Keywords: thickness advanced; limits cobalt; cobalt liner; exploring limits ... See more keywords