Probe beam deflection technique with liquid immersion for fast mapping of thermal conductance
Sign Up to like & getrecommendations! Published in 2024 at "Applied Physics Letters"
DOI: 10.1063/5.0179581
Abstract: Frequency-domain probe beam deflection (FD-PBD) is an experimental technique for measuring thermal properties that combines heating by a modulated pump laser and measurement of the temperature field via thermoelastic displacement of the sample surface. In… read more here.
Keywords: liquid immersion; beam deflection; conductance; probe beam ... See more keywords
Light-absorbent liquid immersion angled exposure for patterning 3D samples with vertical sidewalls
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa5429
Abstract: To make photolithography patterns on 3D samples, the angled (inclined) exposure technique has been used so far. However, technological issues have emerged in making photolithography patterns on the surface of trench structures. The surface of… read more here.
Keywords: light absorbent; immersion; absorbent liquid; liquid immersion ... See more keywords