FEATURES OF PLASMA CHEMICAL ETCHING OF LITHIUM TANTALATE SUBSTRATE (LiTaO3)
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DOI: 10.46813/2021-134-188
Abstract: The results of researches of plasma chemical treatment of lithium monocrystalline tantalate (LiTaO3) from gas type, bias voltage (energy of chemically active ions) and from current of additional bias generator are given. A closed-loop electron… read more here.
Keywords: plasma chemical; litao3; features plasma; lithium ... See more keywords