Influence of annealing ambience on structural and piezoelectric properties of single crystal LiTaO3 thin film
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DOI: 10.1166/mex.2023.2335
Abstract: The crystal-ion-slicing technology is a promising technology for fabricating high-quality single crystal piezoelectric thin films. This work attempted to investigate the influence of annealing ambience on the properties of LiTaO3 thin films fabricated by crystal-ion-slicing… read more here.
Keywords: single crystal; litao3 thin; piezoelectric properties; influence annealing ... See more keywords