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Published in 2021 at "Applied optics"
DOI: 10.1364/ao.414144
Abstract: The Jones pupil is a full description of imaging properties of projection lenses in optical lithography. The decomposition of the Jones pupil into components with clear physical meanings was studied previously; however, the decomposition method…
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Keywords:
decomposition;
decomposition methods;
lithographic imaging;
imaging impacts ... See more keywords