Lithographic pattern quality enhancement of DMD lithography with spatiotemporal modulated technology.
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DOI: 10.1364/ol.415788
Abstract: In this paper, we propose spatiotemporal modulation projection lithography (STPL) technology, which is a spatiotemporal modulation technology applied to the conventional digital micromirror device (DMD) projection lithography system. Through coordinating the micro-movement of the piezoelectric… read more here.
Keywords: pattern quality; lithography; quality enhancement; technology ... See more keywords