Review for Micro‐Nano Processing Technology of Microstructures and Metadevices
Sign Up to like & getrecommendations! Published in 2025 at "Advanced Functional Materials"
DOI: 10.1002/adfm.202420369
Abstract: As a popular artificial composite material emerging in recent years, metasurfaces are one of the most likely devices to break through the volume limitation of conventional optical components due to their compact structure, flexible materials,… read more here.
Keywords: review micro; nano processing; beam; lithography ... See more keywords
Durable Metallization of Resin Surfaces via Sacrificial Nanotransfer Lithography
Sign Up to like & getrecommendations! Published in 2024 at "Advanced Materials Interfaces"
DOI: 10.1002/admi.202400251
Abstract: By combining sacrificial nanoimprint lithography (SNIL) and transfer printing, sacrificial nanotransfer (SNT) lithography can create metalized polymer surfaces that enable lightweight conductive surface composites. SNT begins with a metal mold made from a high surface… read more here.
Keywords: layer; sacrificial nanotransfer; lithography; surface ... See more keywords
Modification of Self‐Assembled Monolayers by Electron Irradiation as a Tool for Surface Engineering, Lithography, and Nanofabrication
Sign Up to like & getrecommendations! Published in 2025 at "Advanced Materials Interfaces"
DOI: 10.1002/admi.202500954
Abstract: Self‐assembled monolayers (SAMs) have long become an important element of modern nanotechnology. Apart from their primary use in tailoring the chemical and physical properties of surfaces and interfaces, they can be modified by physical tools,… read more here.
Keywords: irradiation; lithography; self assembled; assembled monolayers ... See more keywords
Tailored Optical Functionality by Combining Electron‐Beam and Focused Gold‐Ion Beam Lithography for Solid and Inverse Coupled Plasmonic Nanostructures
Sign Up to like & getrecommendations! Published in 2020 at "Advanced Optical Materials"
DOI: 10.1002/adom.202000879
Abstract: DOI: 10.1002/adom.202000879 plasmonic structures, they struggle as soon as complex arrangements of different nanoparticles are needed, possibly even distributed on large areas as well as in periodic arrangements. Only recently, with the advent of sophisticated… read more here.
Keywords: ion beam; beam lithography; lithography; electron beam ... See more keywords
Photopolymerized Features via Beam Pen Lithography as a Novel Tool for the Generation of Large Area Protein Micropatterns.
Sign Up to like & getrecommendations! Published in 2022 at "Small"
DOI: 10.1002/smll.202105998
Abstract: A cantilever-free scanning probe lithography (CF-SPL)-based method for the rapid polymerization of nanoscale features on a surface via crosslinking and thiol-acrylate photoreactions is described, wherein the nanoscale position, height, and diameter of each feature can be finely and independently tuned.… read more here.
Keywords: protein; beam pen; lithography; pen lithography ... See more keywords
DNA-Assisted Molecular Lithography.
Sign Up to like & getrecommendations! Published in 2018 at "Methods in molecular biology"
DOI: 10.1007/978-1-4939-8582-1_20
Abstract: During the past decade, DNA origami has become a popular method to build custom two- (2D) and three-dimensional (3D) DNA nanostructures. These programmable structures could further serve as templates for accurate nanoscale patterning, and therefore… read more here.
Keywords: dna; dna assisted; dna origami; molecular lithography ... See more keywords
Soft lithography based on photolithography and two-photon polymerization
Sign Up to like & getrecommendations! Published in 2018 at "Microfluidics and Nanofluidics"
DOI: 10.1007/s10404-018-2118-5
Abstract: Over the past decades, soft lithography has greatly facilitated the development of microfluidics due to its simplicity and cost-effectiveness. Besides, numerous fabrication techniques such as multi-layer photolithography, stereolithography and other methods have been developed to… read more here.
Keywords: photon polymerization; two photon; lithography; soft lithography ... See more keywords
A high-speed exposure method for digital micromirror device based scanning maskless lithography system
Sign Up to like & getrecommendations! Published in 2019 at "Optik"
DOI: 10.1016/j.ijleo.2019.04.009
Abstract: Abstract During the process of scanning maskless lithography, exposure speed determines the efficiency and productivity of lithography fabrication. In this paper, a novel Digital Micromirror Device(DMD) based high-speed exposure method is proposed to optimize the… read more here.
Keywords: speed; maskless; method; lithography ... See more keywords
Fabrication of microgrooved scaffolds using near-field electrospinning-assisted lithography (NFEAL)
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Industrial and Engineering Chemistry"
DOI: 10.1016/j.jiec.2019.08.025
Abstract: Abstract A simple patterning process combining near-field electrospinning (NFE) and template lithography, called near-field electrospinning-assisted lithography (NFEAL), was developed to prepare polymeric scaffolds with microgroove patterns for potential use in biomedical applications. NFE enabled the… read more here.
Keywords: microgrooved scaffolds; peo fibers; field electrospinning; near field ... See more keywords
CrSb2Te thin film as a dry resist and its etching mechanism for lithography application
Sign Up to like & getrecommendations! Published in 2021 at "Materials Chemistry and Physics"
DOI: 10.1016/j.matchemphys.2021.124558
Abstract: Abstract Lithography has important applications in chip manufacturing, micro-electro-mechanical system, nanostructure fabrication, et al. Photoresist is a key factor for the lithography. However, current organic resists suffer from poor line-edge roughness, environmentally unfriendly, et al.… read more here.
Keywords: crsb2te thin; thin film; lithography; film ... See more keywords
Cascade domino lithography for extreme photon squeezing
Sign Up to like & getrecommendations! Published in 2020 at "Materials Today"
DOI: 10.1016/j.mattod.2020.06.002
Abstract: Abstract Squeezing photons into deep sub-wavelength volumes and few-nanometer gaps has led to the investigation of interesting phenomena, including strong coupling, quantum plasmonics, nonlinearity enhancement, nonlocality, and molecular junctions. The common configuration of bowtie nanoantennas… read more here.
Keywords: cascade domino; extreme photon; lithography; domino lithography ... See more keywords