Photocatalytic Lithography with Atomic Layer–Deposited TiO 2 Films to Tailor Biointerface Properties
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DOI: 10.1002/admi.201900035
Abstract: In this article, the use of thin, photocatalytically active TiO2 films deposited using atomic layer deposition (ALD) and a conventional lithography mask are explored for the fabrication of a patterned biointerface. Hereto, a pattern of… read more here.
Keywords: lithography atomic; atomic layer; layer; biointerface ... See more keywords