Fully controllable silicon nanowire fabricated using optical lithography and orientation dependent oxidation
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DOI: 10.1016/j.apsusc.2020.146516
Abstract: Abstract Silicon nanowires (SiNWs) exhibit unique electrical, thermal, and optical properties compared to bulk silicon which make them suitable for various device applications. To realize nanowires in real applications, large-scale and low-cost fabrication method is… read more here.
Keywords: lithography orientation; using optical; optical lithography; orientation dependent ... See more keywords