Fluid flow in UV nanoimprint lithography with patterned templates
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DOI: 10.1016/j.mee.2017.04.001
Abstract: Abstract Fluid flow in UV nanoimprint lithography with patterned template is simulated to study the effect of pattern directionality on droplet merging, throughput and defectivity. Flow in high density patterns is simulated by using an… read more here.
Keywords: nanoimprint lithography; flow nanoimprint; fluid flow; lithography patterned ... See more keywords