Lithography and Plasma Treatment Effect on Conductivity of Carbon Nanotubes
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DOI: 10.1134/s1063782619140148
Abstract: Transparency and sheet resistance measurements of transferred CNT film on glass substrate were performed. Effect of optical lithography and plasma treatment processes on CNT film sheet resistance was analyzed. CNT film demonstrates good electrical conductivity… read more here.
Keywords: plasma treatment; effect; lithography plasma; cnt film ... See more keywords