Information theoretical aspects in coherent optical lithography systems
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DOI: 10.1364/oe.25.029043
Abstract: Optical lithography is extensively used in micro and nano scale semiconductor fabrication. However, the information transmission mechanism in lithography systems is not yet completely understood. This paper studies and analyzes the lithography imaging process from… read more here.
Keywords: lithography systems; information; optical lithography; information theoretical ... See more keywords
Information theoretical approaches in computational lithography.
Sign Up to like & getrecommendations! Published in 2018 at "Optics express"
DOI: 10.1364/oe.26.016736
Abstract: Computational lithography is nowadays playing an indispensible role in improving the imaging performance of optical lithography systems. This paper develops a new and powerful approach to computational lithography by introducing an information theoretical channel modeling… read more here.
Keywords: lithography systems; information; theoretical approaches; information theoretical ... See more keywords