FEM Simulation of a High-Performance 128°Y–X LiNbO3/SiO2/Si Functional Substrate for Surface Acoustic Wave Gyroscopes
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DOI: 10.3390/mi13020202
Abstract: To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the propagation characteristics and gyroscopic effect of Rayleigh waves in a 128°Y–X LiNbO3/SiO2/Si (LNOI) functional substrate were investigated with a three-dimensional finite element method. The… read more here.
Keywords: lnoi substrate; 128 linbo3; surface acoustic; substrate ... See more keywords