CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release
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DOI: 10.1109/lpt.2020.3019114
Abstract: Silicon photonic sensors are promising candidates for lab-on-a-chip solutions with versatile applications and scalable production prospects using complementary metal-oxide semiconductor (CMOS) fabrication methods. However, the widespread use has been hindered because the sensing area adjoins… read more here.
Keywords: back side; silicon photonic; side release; local back ... See more keywords