Synthesis of local epitaxial α-(Cr 1-x Al x ) 2 O 3 thin films (0.08 ≤ x ≤ 0.16) on α-Al 2 O 3 substrates by r.f. magnetron sputtering
Sign Up to like & getrecommendations! Published in 2017 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2017.05.054
Abstract: Abstract (0001) oriented nanocrystalline α-(Cr 1-x Al x ) 2 O 3 (0.08 ≤ x ≤ 0.16) thin films with an average thickness of ~ 270 nm were grown on c -plane α-Al 2 O 3 (0001) single crystal substrates at… read more here.
Keywords: magnetron sputtering; thin films; films substrates; local epitaxial ... See more keywords
Local Epitaxial Templating Effects in Ferroelectric and Antiferroelectric ZrO2.
Sign Up to like & getrecommendations! Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c03151
Abstract: Nanoscale polycrystalline thin-film heterostructures are central to microelectronics, for example, metals used as interconnects and high-K oxides used in dynamic random-access memories (DRAMs). The polycrystalline microstructure and overall functional response therein are often dominated by… read more here.
Keywords: effects ferroelectric; local epitaxial; epitaxial templating; templating effects ... See more keywords