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Published in 2021 at "Ceramics International"
DOI: 10.1016/j.ceramint.2021.08.188
Abstract: Abstract Lithium niobate LiNbO3 (LN) on insulator wafers (LNOI) representing a submicron-thick LN film bonded to a SiO2 layer deposited on a thick LN substrate have been manufactured recently by ion slicing. Today, LNOI is…
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Keywords:
lithium niobate;
dielectric layer;
layer;
local switching ... See more keywords